Facilities

Epitaxial Growth Deposition System Processing System Measurement System

MOCVD :GaAs-based material

MOCVD :GaN-based material

MOCVD :GaN-based material

MOCVD :GaN-on-Silicon

MOCVD :Oxide-based material

PLD

ALD

E-GUN

Thermal

SPUTTER

PECVD

ICP CVD

Photolithography

ICP Etching

Electroplating

Wire bonding

Wafer bonding

X-RAY

Raman Spectrometer

C-VBI-V

Hall Measurement

SEM

AFM

LED Performance Measurement

Thermal Resistance Measurement

Device Life Test

Thin film stress measure system